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Micro/Nano Technology Center

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  • About UsAbout Us Dropdown Toggle
    • Administration and Staff
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  • Capabilities & Equipment
    • Capabilities & Equipment
    • Photolithography
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  • Capabilities & EquipmentCapabilities & Equipment Dropdown Toggle
    • Capabilities & Equipment
    • Photolithography
    • Wafer Thermal Processing
    • Testing & Characterization
    • Etching, Machining, & Bonding
    • Packaging
    • Electron Microscopy & Imaging
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  • How to Become a User
  • User Information
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    • FOM- Facility Online Manager
    • Standard Operating Procedures (SOP's)
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    • Photoresist Profiles for DRIE S1827 and AZ4620
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    • TiW_Stress_Control_2.pdf
    • GeSndeptestdata.xlsx
  • User InformationUser Information Dropdown Toggle
    • How to Become a User
    • FOM- Facility Online Manager
    • Standard Operating Procedures (SOP's)
    • Characterization Data
    • Dicing Request
    • Photomask Request
    • Cleanroom Safety Guidelines
    • SDS Database
    • L-Edit design
    • Photoresist Profiles for DRIE S1827 and AZ4620
    • PEALD and ALD SOP
    • TiW_Stress_Control_2.pdf
    • GeSndeptestdata.xlsx
  • MNTC Rates
    • MNTC Rates Effective 6-1-2023
    • MNTC Rates Effective June 1, 2025
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    • MNTC Rates Effective 6-1-2023
    • MNTC Rates Effective June 1, 2025
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  • Self - Guided Tour
  • ECE 544 Microfabrication/MEMS Laboratory
The Micro/Nano Technology Center (MNTC) is a class 100/1000 $30 million 10,000ft2 cleanroom facility.

The Micro/Nano Technology Center (MNTC) is a class 100/1000 $30 million 10,000 ft2 cleanroom facility and the Huson Imaging & Characterization Laboratory.

We are an open fabrication facility where our system and tools may be utilized for prototyping and small-scale manufacturing.

We are an open fabrication facility where our system and tools may be utilized for prototyping and small-scale manufacturing.

From mask writing to wirebonding, save time and money! Our team of professional engineers can help with your project.

From mask writing to wirebonding, save time and money! Our team of professional engineers can help with your project.

The Center's expertise resides in micro and nanotechnology, sensors, transducers, microelectromechanical systems (MEMS), advanced materials, biomedical devices, space and governmental applications.

The Center's expertise resides in micro and nanotechnology, sensors, transducers, microelectromechanical systems (MEMS), advanced materials, biomedical devices, space and governmental applications.

Access to the facility is relatively easy or microfabrication services can be provided by the MNTC's professional engineering staff.

Access to the facility is relatively easy or microfabrication services can be provided by the MNTC's professional engineering staff.

The Micro/Nano Technology Center (MNTC) supports a wide range of research initiated by faculty, academic institutions, start-ups, medium and large businesses around the country.

The Micro/Nano Technology Center (MNTC) supports a wide range of research initiated by faculty, academic institutions, start-ups, medium and large businesses around the country.

The center offers a large array of capabilities, an experienced engineering team, protection of intellectual property (IP), easy online bill payment, competitive pricing, and a business mindset.

The center offers a large array of capabilities, an experienced engineering team, protection of intellectual property (IP), easy online bill payment, competitive pricing, and a business mindset.

The Huson Imaging & Characterization laboratory contains the new Thermo-Fisher Scientific Apreo C Scanning Electron Microscope, scanning probe and an infrared thermal imaging microscope.

The Huson Imaging & Characterization laboratory contains the new Thermo-Fisher Scientific Apreo C Scanning Electron Microscope, scanning probe and an infrared thermal imaging microscope.

Contact a member of the MNTC today for training and/or send your sample for metrology services.

Contact a member of the MNTC today for training and/or send your sample for metrology services.

The Thermo-Fisher Scientific Apreo SEM is capable of advanced detection and flexible sample handling to meet your research needs.

The Thermo-Fisher Scientific Apreo SEM is capable of advanced detection and flexible sample handling to meet your research needs.

‹ ›
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Capabilities and Equipment

 


 


 


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MNTC Intro Video

National Nanotechnology Initiative

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